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德國XENOS Semiconductor Technologies GmbH
XENOS 半導(dǎo)體技術(shù)有限公司成立于2001 年，主要為半導(dǎo)體技術(shù)和納米技術(shù)，尤其是電子或高聚焦離子束平版印刷提供工具、工藝和服務(wù)。我們的半導(dǎo)體平版印刷產(chǎn)品范圍廣泛，既包括附加微影機的翻新、掃描式電子顯微鏡（從XeDraw（10 赫茲）到直寫速度為20 兆赫、40 兆赫或50 兆赫的高速微影機XPG2），也包括裝備完善的FIB（聚焦離子束）、100 千電子伏特肖特基發(fā)射極電子束光刻系統(tǒng)。

與爭競伙伴相比，我們的平版印刷設(shè)備具有以下優(yōu)勢：
● 直寫速度快，可達50 赫茲像素頻率。
● 智能化寫入原函數(shù)，特別適用于光學(xué)儀器，如：在寫入速度最大情況下，通過專門多項式生成硬件，由第三級仿樣擬合生成的彎曲寫入原函數(shù)。
● 可靈活用于未來的研究和應(yīng)用，由于廣泛使用了可編程邏輯和復(fù)雜精密的固件，并具有內(nèi)核導(dǎo)入功能，產(chǎn)品的硬件、軟件和固件能在數(shù)分鐘內(nèi)輕松升級。
● 與經(jīng)驗豐富的平版印刷用戶合作開發(fā)達到最新技術(shù)發(fā)展水平的、便于用戶使用的軟件。
我們的團隊由優(yōu)秀熟練的平版印刷和半導(dǎo)體技術(shù)專家組成，在我們靈活性較高的產(chǎn)品的幫助下，
他們能根據(jù)客戶在使用過程中遇到的問題找到最佳解決方案。
鑒于此，我們能與客戶合作設(shè)計新產(chǎn)品、完善新產(chǎn)品，如將最高寫入速度最佳化。

XENOS Semiconductor Technologies GmbH was founded in 2001 and is dealing with
tools, processes and services for Semiconductor- and Nanotechnology, especially Electron or
Focussed Ion Beam Lithography (FIB).
Our product portfolio of Semiconductor Lithography Systems ranges from add-on writers
retrofitting to Scanning Electron Microscopes (from XeDraw (10 MHz) to the dedicated high
speed writer XPG2 with 20, 40 or 50 MHz writing speed) to fully equipped FIB and 100 keV
Schottky emitter EBL systems.
Our Lithography Systems stand out from our competitors by several important advantages:
● high writing speeds up to 50 MHz pixel frequency
● intelligent writing primitives, especially for optical devices, e.g. curved writing
primitives generated by 3rd order spline approximations with full writing speed
due to a dedicated polynomial generation hardware
● extreme flexibility for future-proof research applications: hard-, soft- and firmware
can be easily upgraded within only minutes due to extensive use of programmable
logic and sophisticated firmware- and kernel boot functions.
● user friendly state-of-art software developed in cooperation with experienced
lithography users.
All members of our team are highly qualified and skillfull lithography and semiconductor
technology experts that can assist to find the appropriate solution for our customer?s
application problems with the help of the high flexibility of our advanced products.
Therefore, we are able to design and optimize our products in cooperation with our customers,
e.g. optimizations for high writing speed.